Silicon Technologies. Ion Implantation and Thermal Treatment. Annie Baudrant
Silicon Technologies. Ion Implantation and Thermal Treatment
Год выпуска: 0
Автор произведения: Annie Baudrant
Жанр: Техническая литература
Издательство: John Wiley & Sons Limited
isbn: 9781118601112
Краткое описание:
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.