Lithography. Stefan Landis
Lithography
Год выпуска: 0
Автор произведения: Stefan Landis
Жанр: Техническая литература
Издательство: John Wiley & Sons Limited
isbn: 9781118621233
Краткое описание:
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.