CVD of Compound Semiconductors. Precursor Synthesis, Developmeny and Applications. Jones Anthony C.
CVD of Compound Semiconductors. Precursor Synthesis, Developmeny and Applications
Год выпуска: 0
Автор произведения: Jones Anthony C.
Жанр: Прочая образовательная литература
Издательство: John Wiley & Sons Limited
isbn: 9783527614622
Краткое описание:
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials. Topics included: * techniques for compound semiconductor growth * metalorganic precursors for III-V MOVPE * metalorganic precursors for II-VI MOVPE * single-source precursors * chemical beam epitaxy * atomic layer epitaxy Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.