High-k Gate Dielectrics for CMOS Technology. He Gang
High-k Gate Dielectrics for CMOS Technology
Год выпуска: 0
Автор произведения: He Gang
Жанр: Техническая литература
Издательство: John Wiley & Sons Limited
isbn: 9783527646371
Краткое описание:
A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies. Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.