Ferroelectric Dielectrics Integrated on Silicon. Emmanuel Defaÿ
Ferroelectric Dielectrics Integrated on Silicon
Год выпуска: 0
Автор произведения: Emmanuel Defaÿ
Жанр: Техническая литература
Издательство: John Wiley & Sons Limited
isbn: 9781118602768
Краткое описание:
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Deposition and patterning technologies are then presented. A whole chapter is dedicated to the major role played in the field by X-Ray Diffraction characterization, and other characterization techniques are also described such as Radio frequency characterization. An in-depth study of the influence of leakage currents is performed together with reliability discussion. Three applicative chapters cover integrated capacitors, variables capacitors and ferroelectric memories. The final chapter deals with a reasonably new research field, multiferroic thin films.