Measurement Technology for Micro-Nanometer Devices. Zongmin Ma
Measurement Technology for Micro-Nanometer Devices
Год выпуска: 0
Автор произведения: Zongmin Ma
Жанр: Техническая литература
Издательство: John Wiley & Sons Limited
isbn: 9781118717981
Краткое описание:
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices