Microsystem Technology. Wolfgang Menz
Microsystem Technology
Год выпуска: 0
Автор произведения: Wolfgang Menz
Жанр: Техническая литература
Издательство: John Wiley & Sons Limited
isbn: 9783527613014
Краткое описание:
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.