Фотонно-стимулированные технологические процессы микро- и нанотехнологии. Игорь Житяев

Фотонно-стимулированные технологические процессы микро- и нанотехнологии

получения кремниевых лент включает в себя химическое осаждение из паровой фазы кремния на временную подложку, после отделения полученного слоя, подложка может быть вновь использована. Этим методом получают кремниевые подложки толщиной до 100-150 мкм.

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